| 丁伟,张孟政.基于传输相位的780 nm氮化硅偏振无关激光聚焦超构透镜数值仿真[J].安徽建筑大学学报,2026,34(4):52-58 |
| 基于传输相位的780 nm氮化硅偏振无关激光聚焦超构透镜数值仿真 |
| Numerical Simulation of a 780 nm Silicon Nitride Transmission-Phase-Based Polarization-Independent Laser-Focusing Metalens |
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| DOI： |
| 中文关键词: 氮化硅 超构透镜 偏振不敏感 FEM 聚焦效率 |
| 英文关键词: Si3N4 metalens polarization-insensitive FEM focusing efficiency |
| 基金项目:安徽省高校省级自然科学研究重点项目（2024AH050246）；安徽省智能建筑与建筑节能重点实验室开放课题项目（IBES2024ZR02） |
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| 中文摘要: |
| 针对近红外波段激光透镜存在的透射率低、吸收率高、加工工艺难度大等问题，本文依托氮化硅材料低损耗、宽透明窗口、高功率耐受能力及与CMOS工艺兼容的优势，提出一种偏振不敏感超构透镜。该透镜以低折射率材料二氧化硅为衬底，以高透射率氮化硅材料作为相位调控基本单元，设计工作波长为780 nm。本文采用有限元仿真软件对超构透镜单元结构的光学特性进行分析与参数优化，结果表明：器件平均透射率可达93.74%，仿真焦距为6.005 9 μm，与理论设计值误差仅为0.098%，聚焦效率达68.86%，半峰全宽（full width at half maxima，FWHM）为735.2 nm，光斑尺寸接近衍射极限。进一步分析表明，在口径固定条件下，不同焦距的超构透镜均具备优异的聚焦性能，聚焦效率均高于68.3%。该设计可推动光学透镜向轻量化、平面化方向发展，有效降低制备成本，在激光器件领域具备广阔的应用前景。 |
| 英文摘要: |
| To overcome the challenges of low transmittance, high absorption, and processing difficulties encountered by laser lenses working in the near-infrared wavelength band, this work proposes a polarization-insensitive metalens leveraging the advantages of silicon nitride: low optical loss, broad transmission bandwidth, improved power endurance, and compatibility with CMOS fabrication processes. The device uses low-refractive-index silica as the substrate and high-transmittance silicon nitride as the basic phase-modulation structural unit, with the operating wavelength fixed at 780 nm. Finite element method (FEM) simulation software was adopted to systematically analyze the optical properties of the metalens unit cell and optimize its structural parameters. An average transmittance of 93.74% was ultimately obtained. The simulated focal length of the proposed lens is 6.005 9 μm, deviating merely 0.098% from the theoretical design value. Its focusing efficiency hits 68.86%, and the full width at half maximum (FWHM) is 735.2 nm; the focal spot size is close to the diffraction limit. Additional analyses indicate that metalenses with different focal lengths maintain excellent focusing performance under a constant aperture, with focusing efficiencies all higher than 68.3%. This design facilitates the development of lightweight planar lenses, cuts fabrication costs, and possesses extensive application potential in laser engineering. |
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