| 黄磊,张雨,陈雪辉,李昊.水速对水射流辅助激光加工碳化硅中能量利用率的影响研究[J].安徽建筑大学学报,2023,31(): |
| 水速对水射流辅助激光加工碳化硅中能量利用率的影响研究 |
| Effects of water velocity on energy utilization rate in laser-water composite processing of silicon carbid |
| 投稿时间：2021-11-29 修订日期：2021-12-20 |
| DOI： |
| 中文关键词: 复合加工 碳化硅 激光刻蚀 槽体 |
| 英文关键词: water jet Silicon Carbide laser etching groove |
| 基金项目:安徽建筑大学自然科学项目；安徽建筑大学博士启动基金项目项目 |
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| 中文摘要: |
| 为了探究水速对水射流辅助激光加工碳化硅中能量有效利用率和槽体体积以及复合加工质量的影响，首先模拟入射角45°时不同水速冲击材料产生的冲击作用同时从理论上分析激光-水-材料间的冷却和冲击作用，借助有限元软件模拟不同水速对材料的冲击作用并通过试验验证。结果表明：单纯激光刻蚀时，加工槽体体积最大，槽体底部堆积大量熔渣同时槽体壁面也存在较多的重铸层，加工质量较差；随着水速的增大复合加工槽体体积呈先减小后增大再减小的规律，同时能量有效利用率也呈现相同趋势；水速为8 m?s-1时，复合刻蚀体积和有效能量利用率较空气中激光加工均有所减小，槽体底部熔渣小部分被去除，重铸层呈现沟壑状；水速24 m?s-1时，复合加工槽体的体积和有效能量利用率均最大，底部熔渣堆积较少，同时壁面重铸层大量减小，加工质量较好。 |
| 英文摘要: |
| In order to explore the influence of water velocity on the effective utilization rate of energy, the volume of tank and the quality of composite processing in water jet-assisted laser processing of silicon carbide, the impact effect of different water velocity on materials at an incident Angle of 45° was simulated, and the cooling and impact effect between laser-water-material was analyzed theoretically.The impact of different water velocities on materials is simulated by finite element software and verified by experiments.The results show that when laser etching is used alone, the volume of the machining groove is the largest, a large amount of slag accumulates at the bottom of the groove and there are many recasting layers on the wall of the groove, and the machining quality is poor.With the increase of water velocity, the volume of the composite machining tank decreases first, then increases and then decreases, and the effective energy utilization rate also shows the same trend.When the water velocity is 8 m?s-1, the composite etching volume and effective energy utilization ratio decrease compared with laser processing in air, and a small part of slag is removed at the bottom of the tank, and the recast layer presents a gully shape.When the water rate is 24 m?s-1, the volume and effective energy efficiency of the composite processing tank are the maximum, the slag accumulation at the bottom is less, and the recasting layer on the wall is greatly reduced, and the processing quality is good. |
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