| 吴小四,朱银锋,唐梦雨,郑旭,Mohmmed Mun ELseed Hassaan.直拉式单晶硅生长炉超导磁体研究[J].安徽建筑大学学报,2022,30(3):67-73,104 |
| 直拉式单晶硅生长炉超导磁体研究 |
| Study on Superconducting Magnet for Czochralski Single Crystal Silicon Growth Furnace |
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| DOI： |
| 中文关键词: 超导磁体 磁场直拉法 导体 结构参数 匝数排布 磁场强度 |
| 英文关键词: superconducting magnet Czochralski method conductor structural parameters turns arrangement magnetic fieldintensity |
| 基金项目:国家自然科学基金面上项目（51877001）；安徽省高等学校自然科学研究重点项目（KJ2019A0789） |
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| 中文摘要: |
| 高集成度芯片发展使半导体行业对硅单晶材料提出尺寸与质量的要求。直拉法（Cz 法）可生成大尺寸硅单晶，但生长中产生热对流，边界层不稳定，晶体易生杂质。因磁场对导电熔体内对流有抑制效果，通过外加磁场可提高生成大尺寸晶体的品质。基于现有研究结果提出了一种用于单晶炉的瓦状结构超导磁体，确定线圈结构参数、导体类型、屏蔽体厚度及磁芯高度，使其满足大尺寸、高品质单晶硅生长所需的磁场强度（约 0.5T）及磁场位型，从而降低漏磁。借助数值分析优化超导磁体结构参数，有望为后续的 MCZ 硅单晶生长工艺参数提供参考。 |
| 英文摘要: |
| With the development of highly integrated chips，the semiconductor industry is placing higher demands on the size andquality of silicon single crystal materials. CZ method can produce large-size silicon single crystals，but the thermal convection generatedduring growth caused unstable boundary layer and the crystals are prone to impurities. Since the magnetic field has a suppressiveeffect on convection in the conductive melt，the quality of the generated large-size crystals can be improved by applying a magneticfield. Based on the existing researches，a tile-shaped superconducting magnet for a single crystal furnace is proposed. The structuralparameters of the coil，conductor type，shield thickness and magnetic core height are determined to meet the magnetic field strength（about0.5 T） and magnetic field pattern required for the growth of large-size，high-quality single crystal silicon，thus reducing magneticleakage. The optimization of the superconducting magnet structure parameters by numerical analysis is expected to provide references forthe subsequent MCZ silicon single crystal growth process parameters. |
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